Ip, KOverberg, M EHeo, Y WNorton, D PPearton, S JStutz, C EKucheyev, SergeiJagadish, ChennupatiWilliams, JamesLuo, BRen, FanLook, David CZavada, J M2015-12-132015-12-130038-1101http://hdl.handle.net/1885/87802Hydrogen is readily incorporated into bulk, single-crystal ZnO during exposure to plasmas at moderate (100-300°C) temperatures. Incorporation depths of >25 μm were obtained in 0.5 h at 300°C, producing a diffusivity of ∼8 × 10-10 cm2/Vs at this tempKeywords: Activation energy; Diffusion; Hydrogen; Plasmas; Secondary ion mass spectrometry; Zinc oxide; Interstitial mechanisms; Single crystals Diffusion; Hydrogen; ZnO200310.1016/S0038-1101(03)00207-72015-12-12