Marmitt, G. G.Rosa, L. F. S.Nandi, S. K.Vos, M.2015-05-072015-05-070368-2048http://hdl.handle.net/1885/13402A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.This work was realized with support from CNPq, Conselho Nacional de Desenvolvimento Científico e Tecnológico – Brazil and the Australian Research Council.© 2015 Elsevier B.V.Electron Rutherford backscatteringSurface analysisDepth profiling2015-02-2110.1016/j.elspec.2015.02.0092016-06-14