Rutherford backscattering using electrons as projectiles: Underlying principles and possible applications

Went, MichaelVos, Maarten2015-12-100168-583Xhttp://hdl.handle.net/1885/39897Ion beam analysis is the method of choice for studying the composition of layers with a thickness exceeding several tens of Å. Recently it has become clear that elastic scattering of keV electrons can be used to determine the surface composition of relatKeywords: Elastic scattering; Electron scattering; Electron spectroscopy; Ion beams; Surface analysis; Surface structure; Ion beam analysis; Ion scattering; Thick layers; Rutherford backscattering spectroscopy Electron-scattering; Rutherford backscattering; Surface analysisRutherford backscattering using electrons as projectiles: Underlying principles and possible applications200810.1016/j.nimb.2008.01.0592015-12-09