O'Connell, DGans, TMeige, AAwakowicz, PeterBoswell, Roderick2015-12-072015-12-070093-3813http://hdl.handle.net/1885/24609The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons drives a two-stream instability also dissipating power in the plasma.Keywords: Atomic spectroscopy; Atoms; Chlorine compounds; Electric discharges; Electric fields; Electromagnetic field theory; Electromagnetic fields; Electrons; Emission spectroscopy; Flow interactions; Inductively coupled plasma; Inert gases; Integrated optoelectr Capacitively coupled plasmas; Discharges; Electric field reversal; Electric fields; Electrodes; Heating; Ionization; Phase resolved optical emission spectroscopy; Plasma diagnostics; Plasma ionization; Plasmas; Radio frequency; Radio-frequency plasmas; Wa200810.1109/TPS.2008.9273482015-12-07