Vos, Maarten2015-12-130304-3991http://hdl.handle.net/1885/71368A novel method for detection of hydrogen by an electron beam in extremely thin samples is described. Elastically scattered electrons impinging with 20-30keV on a thin formvar film were detected at a scattering angle near 45°. In these large momentum tranKeywords: Elasticity; Electron beams; Electron scattering; Rutherford backscattering spectroscopy; Thin films; Thin formvar films; Hydrogen; carbon; element; hydrogen; oxygen; polyvinyl acetate; analysis; article; chemical analysis; chemical composition; controlled and other methods of chemical analysis; Chemical composition analysis; Chemical depth and dopant profiling; Elastic electron scattering; Elastic scattering; Hydrogen detection; Rutherford backscattering (RBS)200210.1016/S0304-3991(02)00127-42015-12-11