Han, TingMadden, SteveBulla, DouglasDebbarma, SukhantaLuther-Davies, Barry2015-12-07May 22-269781457712234http://hdl.handle.net/1885/24973In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.Keywords: Chalcogenide glass; Glass waveguides; Low loss; Nano-imprint; Polydimethylsiloxane PDMS; Rib waveguides; Soft stamps; Thermal nanoimprint lithography; Wafer scale; Electron optics; Glass; Glass lasers; Microchannels; Nanoimprint lithography; Optics; Phase201110.1109/CLEOE.2011.59432542016-02-24