Leech, P WReeves, G KHolland, A SRidgway, Mark C2015-12-130169-4332http://hdl.handle.net/1885/86269Diamond films were implanted with Au or O ions at multiple energies in order to produce a uniform region of C vacancies. Analysis of the implanted films by Raman spectroscopy has shown that the proportion of non-diamond or amorphous carbon increased withKeywords: Amorphization; Chemical vapor deposition; Epitaxial growth; Etching; Gold; Ion implantation; Raman spectroscopy; Surface roughness; Bias energy; Post-implanted surfaces; Diamond films Diamond films; Etching; Ion implantation; Raman spectroscopyThe Effect of Au and O Implantation on the Etch Rate of CVD Diamond200410.1016/S0169-4332(03)00949-82015-12-12