Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells

Winderbaum, SaulCuevas, AndresTan, JasonDunn, RebeccaPohl, PeterSchmidt, JanHan, Jian-LongRoth, Kristin2015-12-132015-12-13June 6 2003936338191http://hdl.handle.net/1885/84489Unveiling the differences between dynamic and static deposition of PECVD silicon nitride for solar cells20052015-12-12