Zograf, GeorgeZalogina, AnastasiaKoshelev, KirillChoi, Duk-YongKorolev, ViacheslavHollinger, RichardKartashov, DaniilZurch, MichaelSpielmann, ChristianMakarov, SergeyLuther-Davies, BarryKruk, SergeyKivshar, Yuri2022-07-19May 10-15978-194358076-7http://hdl.handle.net/1885/269787We demonstrate nonlinear silicon metasurfaces empowered by collective localized modes governed by bound states in the continuum operating in mid-infrared spectral range. When being resonantly excited, the metasurfaces generate 3rd to 11th odd optical harmonics.The authors acknowledge a financial support from the Australian Research Council and the Russian Foundation for Basic Research (grant 19-32-90106) and the Federal Ministry of Education and Research (BMBF) under the "Make our Planet Great Again – German Research Initiative", grant number 57427209, implemented by the German Academic Exchange Service (DAAD).application/pdfen-AU© 2020 OSA © 2020 The Author(s)High-Harmonic Generation in Dielectric Metasurfaces Empowered by Bound States in the Continuum20202021-08-01