McRae, Terry GHsu, Magnus T LFreund, Christopher HShaddock, Daniel AHerrmann, JanGray, Malcolm B2016-04-272016-04-270146-9592http://hdl.handle.net/1885/101135We present a method for the linearization and minimization of interferometer cyclic error. We utilize a polynomial curve fitting and resampling algorithm to correct for nonlinear mirror displacement. In the frequency domain, this algorithm compresses cyclic error into a single-frequency component and enables the precise measurement of cyclic error in a noise-dominated environment. We have applied the technique to determine the cyclic error for a range of interferometer components. In addition, we have used these measurements to optimize interferometer configuration and performance such that we routinely achieve a cyclic error of ∼50 pm for our custom Glan-Laser interferometer and ∼100 pm for a commercial interferometer.© 2012 Optical Society of AmericaKeywords: Commercial interferometers; Cyclic errors; Frequency domains; Heterodyne laser interferometry; Nonlinear mirrors; Polynomial curve fitting; Precise measurements; Resampling algorithms; Single-frequency; Algorithms; Curve fitting; Laser interferometry; Lin2012-07-0110.1364/OL.37.0024482016-06-14