Zheng, ChaoqunShen, YangLiu, MingkaiLiu, WenjieWu, ShaoyingJin, Chongjun2020-03-221936-086Xhttp://hdl.handle.net/1885/202419Nanotransfer printing (nTP) technology can generate highly functional three-dimensional (3D) nanostructures in a low-cost and high-throughput fashion. Nevertheless, the fabrication yield and quality of the transferred nanostructures are often limited by the merging of the surface patterns of replica stamps during transfer printing. Here, an nTP technology was developed to fabricate large-area and crack-free 3D multilayer nanostructures. Instead of directly depositing materials on the patterned flexible stamp in conventional nTPs, we transferred the nanostructures straightforwardly onto an attached polydimethylsiloxane slab by removing a sacrificial water-soluble poly(acrylic acid) film, which can avoid the cracking of metal film and the failures of printing nanostructures onto target substrates. Based on this approach, subwavelength-thick polarization rotators working at infrared wavelengths were fabricated. Excellent performance of linear polarization rotation over a broadband was realized. This nTP approach could complement existing fabrication techniques and benefit the development of various functional nanostructures with complex multilayer hierarchies.The authors acknowledge the financial support from the National Natural Science Foundation of China (91850106, 11574406, 11874436, 11504437, and 61604179), the Key Project of NSF of Guangdong Province (2016A030311049), Pearl River S&T Nova Program of Guangzhou (201806010147), and the Fundamental Research Funds for the Central Universities (17lgpy07).application/pdfen-AU© 2019 American Chemical Society201910.1021/acsnano.9b005492022-05-29