Shishkin, I IRybin, M VSamusev, K BLimonov, M FKiyan, R VChichkov, B NBelov, PavelKivshar, Yuri2015-12-100021-3640http://hdl.handle.net/1885/60446As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersioCopyright Information: © Pleiades Publishing, Ltd., 2014 http://www.sherpa.ac.uk/romeo/issn/0021-3640/ Author's post-print on any open access repository after 12 months after publication (Sherpa/Romeo as of 27/10/2015).Fabrication of Submicron Structures by Three-Dimensional Laser Lithography201410.1134/S00213640140901122016-02-24