Vu, KhuMadden, Steve2015-12-07May 22-269781457712234http://hdl.handle.net/1885/23371We report for the first time Erbium doped Tellurium dioxide single-mode planar rib waveguide amplifiers with net fiber to fiber gain and wide bandwidth operation. Peak internal gains of up to 14dB have been achieved in 5cm long rib waveguides (2.8dB/cm) fabricated by co-sputtering of Tellurium and Erbium in an oxygen ambient and reactive ion etching.Keywords: Cosputtering; Erbium doped; Fiber to fiber gain; Net gain; Oxygen ambient; Rib waveguides; Single mode; Tellurium dioxide; Wide bandwidth; Erbium; Fiber amplifiers; Oxygen; Sputter deposition; Tellurium; Tellurium compounds; Waveguides; Reactive ion etchi201110.1364/OE.18.0191922016-02-24