Xu, LLeijthens, X. J. MDocter, Bde Vries, T DSmallbrugge, BarryKarouta, FouadSmit, Meint K2015-12-13September9781424450961http://hdl.handle.net/1885/71803We present a novel, compact, on-chip multi-mode interference (MMI) reflector, with near-100% theoretical reflection. We measured 78±10% reflection for an InP-based MMI-reflector fabricated with a single etch step with inductively coupled plasma (ICP) etcKeywords: InP; Multi-mode interference; On chips; Photonic integrated circuits; Single etch; Inductively coupled plasma; Integrated circuits; Integrated optoelectronics; Photonics; Reflection; Optical communication20092016-02-24