Han, TingMadden, SteveZhang, YangCharters, RobbieLuther-Davies, Barry2015-12-1328 July 209781424427178http://hdl.handle.net/1885/72778We report here on the use of nanoimprint technologyto fabricate low cost planar waveguides in a Polysiloxane polymer system capable of passing the stringent Telcordia environmental and reliability criteria. Low loss buried channel waveguides with core cross sections of 3x3 microns and a 2% refractive index contrast were fabricated on bare silicon wafers with a simple and fast four step process using a 100mm diameter Polydimethylsiloxane (PDMS) stamp. The waveguides were patterned using an innovative "minimum fluid displacement" method which eliminated the residual films often seen either side of rib like features such as the waveguide cores, and which also produced very good dimensional control of the core itself regardless of the uncured spun core layer thickness.Keywords: Buried channels; Core layers; Cross sections; Dimensional controls; Fluid displacements; Low costs; Low loss; Nanoimprint; Polydimethylsiloxane stamps; Polymer systems; Polymer waveguides; Polysiloxane; Reliability criterion; Residual films; Telcordia; Wa Nanoimprint; Polysiloxane; Waveguide200810.1109/COMMAD.2008.48021222016-02-24