Preferential Amorphization and Defect Annihilation at Nanocavities in Silicon Durion Ion Irradiation

Williams, JamesZhu, XiaohuaRidgway, Mark CConway, MartinWilliams, Ben CFortuna, Frank NicholasRuault, M-OBernas, Harry2015-12-070003-6951http://hdl.handle.net/1885/24694Si containing a band of nanocavities has been irradiated with Si+ ions at elevated temperatures to study interactions of irradiation-induced defects with open volume defects. For irradiation at 100°C, nanocavities are shown to be preferential nucleationPreferential Amorphization and Defect Annihilation at Nanocavities in Silicon Durion Ion Irradiation20002015-12-07