Nanostructures and their metastabilities in silicon induced by ion bombardment

Zhu, Xianfang2018-09-172018-09-172000b2072387http://hdl.handle.net/1885/147683iv, 74 leaves ; 30 plsen-AUTK7871.85.Z58 2000Ion bombardmentSemiconductorsSiliconNanostructures and their metastabilities in silicon induced by ion bombardment200010.25911/5d611a76ba6582018-08-31