Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges

Abstract

A two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rfsheathheating is too weak to sustain the discharge, and that secondary electron acceleration within the sheath is the primary heating mechanism. Due to a capacitive voltage divider formed by the rfsheaths at each electrode, the area ratio of the powered and ground electrodes is observed to have a strong effect on the resulting discharge, and if the ground electrode area is too small, the voltage drop at the powered electrode is too low to sustain a hollow cathodedischarge.