Effects of Tube Length and Radius for Inner Surface Plasma Immersion Ion Implantation Using an Auxiliary Electrode

Kwok, Terry; Zeng, X; Chen, Q; Sheridan, T

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Effects of Tube Length and Radius for Inner Surface Plasma Immersion Ion Implantation Using an Auxiliary Electrode

Date

1999

Authors

Kwok, Terry

Zeng, X

Chen, Q

Sheridan, T

Publisher

Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

Plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded auxiliary electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters