On the Pulsed Anodic Oxidation of n + -InP

Date

2002

Authors

Deenapanray, Prakash
Martin, Anthony H
Lever McGowan, Penelope
Jagadish, Chennupati

Journal Title

Journal ISSN

Volume Title

Publisher

Electrochemical Society Inc

Abstract

We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes

Description

Keywords

Keywords: Anodic oxidation; Atomic force microscopy; Current density; Semiconductor doping; Semiconductor quantum wells; Anodization; Semiconducting indium phosphide

Citation

Source

Electrochemical and Solid-State Letters

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1149/1.1477295

Restricted until

2037-12-31