On the Pulsed Anodic Oxidation of n + -InP
Date
2002
Authors
Deenapanray, Prakash
Martin, Anthony H
Lever McGowan, Penelope
Jagadish, Chennupati
Journal Title
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Volume Title
Publisher
Electrochemical Society Inc
Abstract
We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes
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Keywords
Keywords: Anodic oxidation; Atomic force microscopy; Current density; Semiconductor doping; Semiconductor quantum wells; Anodization; Semiconducting indium phosphide
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Source
Electrochemical and Solid-State Letters
Type
Journal article
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2037-12-31