On the Pulsed Anodic Oxidation of n + -InP
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Deenapanray, Prakash
Martin, Anthony H
Lever McGowan, Penelope
Jagadish, Chennupati
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Electrochemical Society Inc
Abstract
We have performed a parametric investigation of the anodic oxidation of highly doped n-type InP(100) using a pulsed current source. Approximately 75% of the oxide growth took place within the first ∼ 10 s of oxidation, and the equilibrium oxide thicknes
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Electrochemical and Solid-State Letters
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2037-12-31