Multilayer etching for kerf-free solar cells from macroporous silicon
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Schafer, Soren
Ernst, Marco
Kajari-Schroder, Sarah
Brendel, Rolf
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Elsevier
Abstract
Kerf-free techniques for subdividing a single thick crystalline Si wafer into a multitude of thin Si layers have a large potential for cost reductions. In this paper, we explore pore formation in Si for separating many 18 μm-thick surface-textured layers
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Energy Procedia