A Deep Level Transient Spectroscopy Study of Vacancy-related Defect Profiles in Channeled Ion Implanted Silicon
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Lay, M. D. H.
McCallum, Jeffrey C.
de Azevedo, Gustavo
Deenapanray, Prakash
Jagadish, Chennupati
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Institute of Electrical and Electronics Engineers (IEEE Inc)
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2002 Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings