Surface passivation by atomic-layer-deposited Al 2 O 3 /TiO 2 stacks

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dc.contributor.authorSuh, Dong Chul
dc.contributor.authorYu, Jun X
dc.contributor.authorLiang, Wensheng
dc.contributor.authorWeber, Klaus
dc.contributor.authorChoi, Duk-Yong
dc.coverage.spatialTampa United States of America
dc.date.accessioned2015-12-13T22:55:51Z
dc.date.createdJune 16-21 2013
dc.date.issued2013
dc.date.updated2015-12-11T11:12:55Z
dc.description.abstractA detailed study of the passivation quality of Al2O3 and TiO2 stacks on boron-doped emitters, where the stacks were deposited by thermal atomic layer deposition. The passivation quality was studied for different post-TiO2 anneal temperature, as a function
dc.identifier.isbn9781479932993
dc.identifier.urihttp://hdl.handle.net/1885/82695
dc.publisherIEEE
dc.relation.ispartofseries39th IEEE Photovoltaic Specialists Conference, PVSC 2013
dc.sourceConference Record of the IEEE Photovoltaic Specialists Conference
dc.titleSurface passivation by atomic-layer-deposited Al 2 O 3 /TiO 2 stacks
dc.typeConference paper
local.bibliographicCitation.lastpage1306
local.bibliographicCitation.startpage1304
local.contributor.affiliationSuh, Dong Chul, College of Engineering and Computer Science, ANU
local.contributor.affiliationChoi, Duk-Yong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationYu, Jun X, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLiang, Wensheng, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.authoremailu4219275@anu.edu.au
local.contributor.authoruidSuh, Dong Chul, u5074214
local.contributor.authoruidChoi, Duk-Yong, u4219275
local.contributor.authoruidYu, Jun X, u4017226
local.contributor.authoruidLiang, Wensheng, u4804098
local.contributor.authoruidWeber, Klaus, u9116880
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor090605 - Photodetectors, Optical Sensors and Solar Cells
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationf5625xPUB10916
local.identifier.doi10.1109/PVSC.2013.6744381
local.identifier.scopusID2-s2.0-84896464667
local.identifier.uidSubmittedByf5625
local.type.statusPublished Version

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