Effect of crystallization on the reliability of unipolar resistive-switching in HfO 2 -based dielectrics

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Nawaz (Saleh), Muhammad
Venkatachalam, Dinesh
Elliman, Robert

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Elsevier

Abstract

The electroforming and unipolar resistive switching characteristics of as-deposited and annealed HfO2 and Hf0.6Si 0.4O2 films are reported. The reliability of HfO 2 devices is shown to be significantly degraded by annealing at 600 °C, during which the fi

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Current Applied Physics

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Restricted until

2037-12-31