Open Research will be updating the system on Tuesday, 14 July 2026, from 8:15 to 9:00 AM. We apologise for any inconvenience caused.

Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures

Thumbnail Image

Date

2004-12-28

Authors

Kluth, S. M.
Álvarez, D.
Trellenkamp, St.
Moers, J.
Mantl, S.
Kretz, J.
Vandervorst, W.

Journal Title

Journal ISSN

Volume Title

Publisher

American Institute of Physics

Abstract

B implants of 1keV, 1×10¹⁵at.cm⁻² into 125-nm-wide, free-standing Si nanostructures have been characterized using scanning spreading resistancemicroscopy following a 0s, 1050°Canneal in N₂. A curved diffusion front has been observed. B in the center of the ridge diffuses further than at the sides. A similar effect has been observed in SUPREM-IV simulations. It is attributed to a reduction in transient enhanced diffusion close to the vertical surfaces due to recombination of ion-implantation-induced excess Si self-interstitials.

Description

Keywords

Keywords: Computer simulation; Diffusion; Ion implantation; Nanostructured materials; Scanning electron microscopy; Temperature distribution; Nanostructures; Scanning spreading resistance microscopy; Silicon

Citation

URI

http://hdl.handle.net/1885/15577

Collections

ANU Research Publications

Source

Journal of Vacuum Science & Technology B

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1116/1.1839898

Restricted until

Downloads

File
Description
01_Kluth_Scanning_spreading_resistance_2004.pdf (409.23 KB)
Published Version

DSpace software copyright © 2002-2026 LYRASIS

abcd