Characterization of low pressure chemical vapour deposited Si3N4 films

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dc.contributor.authorJin, Haoen_AU
dc.contributor.authorWeber, Klausen_AU
dc.contributor.authorBlakers, Andrewen_AU
dc.coverage.spatialCanberra Australia
dc.date.accessioned2015-12-07T22:54:22Z
dc.date.createdSeptember 13-15 2006
dc.date.issued2006
dc.date.updated2015-12-07T12:49:50Z
dc.identifier.isbn0975065041
dc.identifier.urihttp://hdl.handle.net/1885/28162
dc.publisherAustralian and New Zealand Solar Energy Society (ANZSES)
dc.relation.ispartofseriesAustralia and New Zealand Solar Energy Society Conference (Solar 2006)
dc.sourceProceedings of the Conference of the Australia and New Zealand Solar Energy Society (Solar 2006)
dc.source.urihttp://www.anzses.org
dc.titleCharacterization of low pressure chemical vapour deposited Si3N4 films
dc.typeConference paper
local.bibliographicCitation.lastpage5
local.bibliographicCitation.startpage1
local.contributor.affiliationJin, Hao, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANU
local.contributor.authoruidJin, Hao, u4065013
local.contributor.authoruidWeber, Klaus, u9116880
local.contributor.authoruidBlakers, Andrew, u9113453
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationu4251866xPUB56
local.type.statusPublished Version

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