Plasma ionization through wave-particle interaction in a capacitively coupled radio-frequency discharge
Date
2007-03-30
Authors
O’Connell, D.
Gans, T.
Vender, D.
Czarnetzki, U.
Boswell, R.
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American Institute of Physics (AIP)
Abstract
Phase resolved optical emission spectroscopy, with high temporal resolution, shows that wave-particle interactions play a fundamental role in sustaining capacitively coupled rf plasmas. The measurements are in excellent agreement with a simple particle-in-cell simulation. Excitation and ionization mechanisms are dominated by beam-like electrons, energized through the advancing and retreating electric fields of the rf sheath. The associated large-amplitude electronwaves, driven by a form of two-stream instability, result in power dissipation through electron trapping and phase mixing.
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Keywords: Computer simulation; Electric fields; Electron beams; Optical emission spectroscopy; Plasma sources; Plasma waves; High temporal resolution; Plasma ionization; Radio frequency discharges; Wave particle interaction; Ionization
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Physics of Plasmas
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Journal article
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