Improved method for hot embossing As 2 S 3 waveguides employing a thermally stable chalcogenide coating

Abstract

We demonstrate the fabrication of As2S3 rib waveguides using hot embossing. Because of the high temperature required, a thin (50nm) Ge11.5As24Se64.5 was thermally evaporated on top of an 870nm As2S3 layer to protect against surface degradation during embossing. The waveguides propagation loss was 0.52dB/cm for the TE and 0.41dB/cm for the TM polarizations at 1550nm for a waveguide cross-section dimension of 3.8 × 1μm. The nonlinearity of a 2.2μm wide waveguide was shown to be 13500W-1km-1 using four-wave mixing demonstrating that these embossed waveguides were capable of being used for all-optical processing. Show more