A Robust Metal-Assisted Etching Process for Ag-Catalyzed Texturing of Silicon
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Booker, Katherine
Rahman, Shakir
Chong, Teck
Mankelow, R
Weber, Klaus
Blakers, Andrew
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IEEE Electron Devices Society
Abstract
Silicon structures with excellent light-trapping performance have been developed using a silver-catalyzed metal-assisted etching (MAE) process. The MAE process can be well controlled through variation in solution composition and exposure times, even when
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IEEE Journal of Photovoltaics
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Restricted until
2037-12-31
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