Defect complexes in fluorine-implanted germanium
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Sprouster, David
Campbell, Colin
Buckman, Stephen
Impellizzeri, G
Napolitani, E
Ruffell, Simon
Sullivan, James
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Institute of Physics Publishing
Abstract
In the present article we employ positron annihilation lifetime spectroscopy and secondary ion mass spectrometry to study the thermal evolution of vacancy related defects in fluorine-implanted germanium. We find that fluorine enriches the germanium matrix
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Journal of Physics D: Applied Physics
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2037-12-31
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