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Fabrication and characterization of Ge 20 Sb 15 Se 65 chalcogenide glass rib waveguides for telecommunication wavelengths

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Date

2013

Authors

Li, Jun
Shen, Xiang
Sun, Junqiang
Vu, Khu
Wang, Rongping
Luther-Davies, Barry
Dai, Shixun
Xu, Tiefeng
Nie, Qiuhua
Choi, Duk-Yong

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

We report on the fabrication and optical properties of Ge 20Sb15Se65 chalcogenide glass rib waveguides on a single photonic chip.Radio-frequency magnetron sputtering method is employed to deposit 1.36-μm-thick films and reactive ion etching with CHF3 is

Description

Keywords

Keywords: Chalcogenide glass; Difference method; Fabrication and characterizations; Low surface roughness; Magnetron sputtering method; Normal dispersion; Rib waveguides; Telecommunication wavelengths; Dispersion (waves); Fabrication; Germanium; Glass; Surface roug Chalcogenide glasses; Dispersion; Fabrication; Rib waveguides

Citation

URI

http://hdl.handle.net/1885/74955

Collections

ANU Research Publications

Source

Thin Solid Films

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/j.tsf.2013.07.078

Restricted until

2037-12-31

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Description
01_Li_Fabrication_and_2013.pdf (565.34 KB)

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