Indium segregation and enrichment in coherent InxGa1-xAs/GaAs quantum dots
Date
1999
Authors
Liao, X Z
Zou, Jin
Cockayne, David John Hugh
Leon, R
Lobo, C
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American Physical Society
Abstract
Significant differences in the image features of InxGa1-xAs quantum dots (QDs) grown on (001) and vicinal (001) GaAs were seen in [001] on-zone bright-field transmission electron microscope images. Simulated images were obtained by modeling the strain field distribution of the QDs with finite element analysis and then using this model in dynamical electron diffraction contrast simulations. Comparison of the experimental images and the simulated images shows that (i) In segregation exists in the QDs and (ii) the average In content of the QDs is higher than the average In content of the film.
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Keywords
Keywords: Anisotropy; Computer simulation; Crystal orientation; Electron diffraction; Finite element method; Semiconducting indium gallium arsenide; Semiconductor growth; Strain; Stress concentration; Thin films; Transmission electron microscopy; Strain field distr
Citation
Physical Review Letters 82.25 (1999): 5148-5151
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Physical Review Letters
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Journal article
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