A Semiconductor Manufacturing Process And A Semiconductor Article
| dc.contributor.author | Australian National University | en_AU |
| dc.date.accessioned | 2019-04-05T00:28:39Z | |
| dc.date.available | 2019-04-05T00:28:39Z | |
| dc.date.created | 25/08/2010 | en_AU |
| dc.identifier.govdoc | 2010903812 | en_AU |
| dc.identifier.uri | http://hdl.handle.net/1885/159240 | |
| dc.publisher | IP Australia | en_AU |
| dc.rights.holder | The Australian National University | en_AU |
| dc.source.uri | http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2010903812 | en_AU |
| dc.title | A Semiconductor Manufacturing Process And A Semiconductor Article | en_AU |
| dc.type | Patent | en_AU |
| dcterms.accessRights | Open Access via publisher website | |
| local.publisher.url | https://www.ipaustralia.gov.au/ | en_AU |
| local.type.status | Metadata only | en_AU |