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Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching

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Date

2004-10-18

Authors

Ruan, Yinlan
Li, Wei
Jarvis, Ruth
Madsen, Nathan
Rode, Andrei V
Luther-Davies, Barry

Journal Title

Journal ISSN

Volume Title

Publisher

Optical Society of America

Abstract

We report the fabrication and characterization of rib chalcogenide waveguides produced by dry etching with CF4 and O2. The high index contrast waveguides (Δn ~ 1) show a minimum propagation loss of 0.25 dB/cm. The high refractive nonlinearity of ~ 100 times silica in As2S3 allowed observation of a Д phase shift due to self-phase modulation of an 8 ps duration 1573 nm pulse in a 5 cm long waveguide.

Description

Keywords

waveguides, photonic integrated circuits

Citation

Optics Express 12.21 (2004): 5140-5145

URI

http://hdl.handle.net/10440/356
 http://digitalcollections.anu.edu.au/handle/10440/356

Collections

ANU Research Publications

Source

Optics Express

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1364/OPEX.12.005140

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Ruan_Fabrication2004.pdf (1.16 MB)

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