Mechanical Deformation in Silicon by Micro-indentation

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Bradby, Jodie
Williams, James
Wong-Leung, Jennifer
Swain, Michael Vincent
Munroe, Paul

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Materials Research Society

Abstract

The mechanical deformation of crystalline silicon induced by micro-indentation has been studied. Indentations were made using a variety of loading conditions. The effects on the final deformation microstructure of the load-unload rates and both spherical

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Journal of Materials Research

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2037-12-31