RF compensation of double Langmuir probes: modelling and experiment

Abstract

An analytical model describing the physics of driven floating probes has been developed to model the RF compensation of the double langmuir probe (DLP) technique. The model is based on the theory of the RF self-bias effect as described in Braithwaite's work [1], which we extend to include time-resolved behaviour. The main contribution of this work is to allow quantitative determination of the intrinsic RF compensation of a DLP in a given RF discharge. Using these ideas, we discuss the design of RF compensated DLPs. Experimental validation for these ideas is presented and the effects of RF rectification on DLP measurements are discussed. Experimental results using RF rectified DLPs indicate that (1) whenever sheath thickness effects are important overestimation of the ion density is proportional to the level of RF rectification and suggest that (2) the electron temperature measurement is only weakly affected. Show more