Growth of c-axis oriented GaN films on quartz by pulsed laser deposition
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Wang, Rongping
Muto, H
Kusumori, Takeshi
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Elsevier
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We have successfully fabricated highly oriented GaN films on ZnO-buffered quartz by Nd:YAG pulsed laser deposition to develop large area and low cost optoelectronic devices. The quality of the films was investigated as functions of deposition temperature
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Optical Materials
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2037-12-31
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