Effect of titanium incorporation on the structural, mechanical and biocompatible properties of DLC thin films prepared by reactive-biased target ion beam deposition method

Bharathy, P. Vijai; Nataraj, D.; Chu, P K; Wang, Huaiyu; Yang, Q.; Mangalampalli, S.R.N. Kiran; Silvestre-Albero, J.; Mangalaraj, D.

Effect of titanium incorporation on the structural, mechanical and biocompatible properties of DLC thin films prepared by reactive-biased target ion beam deposition method

Date

2010

Authors

Bharathy, P. Vijai

Nataraj, D.

Chu, P K

Wang, Huaiyu

Yang, Q.

Mangalampalli, S.R.N. Kiran

Silvestre-Albero, J.

Mangalaraj, D.

Publisher

Elsevier

Abstract

Amorphous diamond like carbon (DLC) and titanium incorporated diamond like carbon (Ti-DLC) thin films were deposited by using reactive-biased target ion beam deposition method. The effects of Ti incorporation and target bias voltage on the microstructure