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Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

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Date

2010

Authors

Han, Ting
Madden, Steve
Bulla, Douglas
Luther-Davies, Barry

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

Description

Keywords

Keywords: 1550 nm; Chalcogenide glass; Low loss; Nano-imprint; Thermal nanoimprint lithography; Electric losses; Fabrication; Glass; Microelectronics; Nanoimprint lithography; Waveguides; Phase change memory

Citation

URI

http://hdl.handle.net/1885/57374

Collections

ANU Research Publications

Source

2010 conference on Optoelectronic and Microelectronic Materials and Devices Proceedings

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

10.1109/COMMAD.2010.5699775

Restricted until

2037-12-31

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01_Han_Fabrication_of_low_loss_2010.pdf (876 KB)

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