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Protection of Si-Sio2 interfaces from damp heat by overlying SiNx and Si3N4 coatings

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Date

Authors

DAI, Xi
McIntosh, Keith

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Volume Title

Publisher

IEEE

Abstract

PECVD SiNx antireflection coatings are found to suppress the degradation of an underlying oxide during "damp-heat" exposure. Samples are submitted to 85 °C and 85% relative humidity, replicating the damp-heat conditions of the standard reliability tests

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Citation

Source

Conference Record of the IEEE Photovoltaic Specialists Conference

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Restricted until

2037-12-31