Nanoscale energy generation characteristics of piezoelectric thin films
Date
2010
Authors
Bhaskaran, Madhu
Sriram, Sharath
Ruffell, Simon
Mitchell, Arnan
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Publisher
IEEE
Abstract
The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.
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Keywords
Keywords: Current generation; Energy generations; In-situ; Interaction area; Nano scale; Nano-islands; Piezoelectric thin films; Microelectronics; Nanoindentation; Piezoelectricity; Thin films
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Source
Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD
Type
Conference paper
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Restricted until
2037-12-31
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