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Nanoscale energy generation characteristics of piezoelectric thin films

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Date

2010

Authors

Bhaskaran, Madhu
Sriram, Sharath
Ruffell, Simon
Mitchell, Arnan

Journal Title

Journal ISSN

Volume Title

Publisher

IEEE

Abstract

The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.

Description

Keywords

Keywords: Current generation; Energy generations; In-situ; Interaction area; Nano scale; Nano-islands; Piezoelectric thin films; Microelectronics; Nanoindentation; Piezoelectricity; Thin films

Citation

URI

http://hdl.handle.net/1885/83825

Collections

ANU Research Publications

Source

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

10.1109/COMMAD.2010.5699710

Restricted until

2037-12-31

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01_Bhaskaran_Nanoscale_energy_generation_2010.pdf (583.4 KB)

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