Preferential Amorphization and Defect Annihilation at Nanocavities in Silicon Durion Ion Irradiation
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Authors
Williams, James
Zhu, Xiaohua
Ridgway, Mark C
Conway, Martin
Williams, Ben C
Fortuna, Frank Nicholas
Ruault, M-O
Bernas, Harry
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American Institute of Physics (AIP)
Abstract
Si containing a band of nanocavities has been irradiated with Si+ ions at elevated temperatures to study interactions of irradiation-induced defects with open volume defects. For irradiation at 100°C, nanocavities are shown to be preferential nucleation
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Applied Physics Letters
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2037-12-31