Effect of Microstructure on Dielectric Breakdown in Amorphous HfO2 Films
Date
2014
Authors
Nandi, Sanjoy
Llewellyn, David
Belay, Kidane
Venkatachalam, Dinesh
Liu, Xinjun
Elliman, Robert
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Cambridge University Press
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Microscopy and Microanalysis
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Journal article
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2037-12-31
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