Spectral tuning of a three-dimensional photonic-bandgap waveguide signature by silica atomic-layer deposition
Date
2012
Authors
Staude, Isabelle
von Freymann, Georg
Wegener, Martin
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Abstract
Recent progress in three-dimensional sub-micron fabrication has rendered the introduction of waveguide structures into optical three-dimensional photonic bandgap materials possible. However, spectral tuning of the waveguide modes has not been demonstrated so far. Here, we use atomic-layer deposition of amorphous silica to tune the spectral position of an air-core defect waveguide in a three-dimensional silicon woodpile photonic crystal by 225 nm in wavelength. The measured spectral positions of the waveguide signature are in very good agreement with numerical calculations.
Description
Keywords
Citation
Collections
Source
Optical Materials Express
Type
Journal article
Book Title
Entity type
Access Statement
Open Access