Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis

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dc.contributor.authorKinomura, Atsushi
dc.contributor.authorWilliams, James
dc.contributor.authorTsubouchi, N
dc.contributor.authorHorino, Y.
dc.date.accessioned2015-12-13T22:19:14Z
dc.date.issued2002
dc.date.updated2015-12-11T07:45:56Z
dc.description.abstractAtomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing
dc.identifier.issn0168-583X
dc.identifier.urihttp://hdl.handle.net/1885/71693
dc.publisherElsevier
dc.sourceNuclear Instruments and Methods in Physics Research: Section B
dc.subjectKeywords: Annealing; Ion implantation; Monolayers; Platinum; Rutherford backscattering spectroscopy; Nanocavities; Silicon Backscattering; Cavity; Channeling; Gettering; Platinum; Silicon
dc.titlePlatinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis
dc.typeJournal article
local.bibliographicCitation.lastpage610
local.bibliographicCitation.startpage606
local.contributor.affiliationKinomura, Atsushi, National Institute of Advanced Industrial Science and Technology
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTsubouchi, N, National Institute of Advanced Industrial Science and Technology
local.contributor.affiliationHorino, Y., National Institute of Advanced Industrial Science and Technology
local.contributor.authoruidWilliams, James, u8809701
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub2835
local.identifier.citationvolume190
local.identifier.doi10.1016/S0168-583X(01)01219-8
local.identifier.scopusID2-s2.0-0036568867
local.type.statusPublished Version

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