Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis

Date

Authors

Kinomura, Atsushi

Williams, James

Tsubouchi, N

Horino, Y.

Publisher

Elsevier

Abstract

Atomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing

Keywords

Keywords: Annealing; Ion implantation; Monolayers; Platinum; Rutherford backscattering spectroscopy; Nanocavities; Silicon Backscattering; Cavity; Channeling; Gettering; Platinum; Silicon

URI

http://hdl.handle.net/1885/71693

Collections

ANU Research Publications

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

DOI

10.1016/S0168-583X(01)01219-8

Restricted until

2037-12-31

Downloads

File

Description

01_Kinomura_Platinum_Atom_Location_on_the_2002.pdf (96.4 KB)