Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis

Date

2002

Authors

Kinomura, Atsushi
Williams, James
Tsubouchi, N
Horino, Y.

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

Atomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing

Description

Keywords

Keywords: Annealing; Ion implantation; Monolayers; Platinum; Rutherford backscattering spectroscopy; Nanocavities; Silicon Backscattering; Cavity; Channeling; Gettering; Platinum; Silicon

Citation

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0168-583X(01)01219-8

Restricted until

2037-12-31