Walters, Daniel; Fell, Andreas; Ernst, Marco; Franklin, Evan; Weber, Klaus
Aluminium oxide (Al2O3)functions doubly as a high-quality surface passivation material for crystalline silicon and as an aluminium (Al) p-type precursor for laser doping. Thus, p+ doping based on laser ablation of Al2O3 thin-films deposited on a silicon substrate is an attractively simplified process for concurrent local contact definition and aligned surface doping. A number of studies have demonstrated this process, but a careful examination of the influence of laser parameters on the...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.