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The Impact of N2 Anneal on Laser Processed Silicon

Xu, Lujia; Weber, Klaus; Yang, Xinbo; Fell, Andreas; Franklin, Evan

Description

In this paper, the impact of the N2 anneal on laser processed silicon was investigated using photoluminescence (PL) imaging through comparing the PL signal of laser processed samples before and after N2 anneal. The samples capped with different dielectrics or without any dielectric (bare surface) prior to the laser processing were used, enabling the evaluation of the influence of the N2 anneal on the defects caused both by laser thermal effect and by the existence of dielectrics. Generally, it...[Show more]

dc.contributor.authorXu, Lujia
dc.contributor.authorWeber, Klaus
dc.contributor.authorYang, Xinbo
dc.contributor.authorFell, Andreas
dc.contributor.authorFranklin, Evan
dc.date.accessioned2016-02-24T22:41:31Z
dc.identifier.issn1876-6102
dc.identifier.urihttp://hdl.handle.net/1885/98717
dc.description.abstractIn this paper, the impact of the N2 anneal on laser processed silicon was investigated using photoluminescence (PL) imaging through comparing the PL signal of laser processed samples before and after N2 anneal. The samples capped with different dielectrics or without any dielectric (bare surface) prior to the laser processing were used, enabling the evaluation of the influence of the N2 anneal on the defects caused both by laser thermal effect and by the existence of dielectrics. Generally, it was found that N2 anneal is an effective way to reduce both the laser and dielectric induced defects.
dc.publisherElsevier
dc.sourceEnergy Procedia
dc.titleThe Impact of N2 Anneal on Laser Processed Silicon
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume77
dc.date.issued2015
local.identifier.absfor090600 - ELECTRICAL AND ELECTRONIC ENGINEERING
local.identifier.absfor090605 - Photodetectors, Optical Sensors and Solar Cells
local.identifier.ariespublicationU3488905xPUB6857
local.type.statusPublished Version
local.contributor.affiliationXu, Lujia, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.affiliationYang, Xinbo, College of Engineering and Computer Science, ANU
local.contributor.affiliationFell, Andreas, College of Engineering and Computer Science, ANU
local.contributor.affiliationFranklin, Evan, College of Engineering and Computer Science, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage759
local.bibliographicCitation.lastpage765
local.identifier.doi10.1016/j.egypro.2015.07.107
dc.date.updated2016-02-24T10:12:26Z
local.identifier.scopusID2-s2.0-84948397618
CollectionsANU Research Publications

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