Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma
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Chatterjee, Sanghamitro; Bhattacharjee, Sudeep; Charles, Christine; Boswell, Rod
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Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma (ICP) at 13.56 MHz. It is found that for both cases of varying L (0.1–0.5 m) and p (1–10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and non-Maxwellian with a hot tail in the symmetric unbounded directions (y, z). The plasma space...[Show more]
dc.contributor.author | Chatterjee, Sanghamitro | |
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dc.contributor.author | Bhattacharjee, Sudeep | |
dc.contributor.author | Charles, Christine | |
dc.contributor.author | Boswell, Rod | |
dc.date.accessioned | 2016-02-08T04:41:34Z | |
dc.date.available | 2016-02-08T04:41:34Z | |
dc.identifier.issn | 2296-424X | |
dc.identifier.uri | http://hdl.handle.net/1885/97979 | |
dc.description.abstract | Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma (ICP) at 13.56 MHz. It is found that for both cases of varying L (0.1–0.5 m) and p (1–10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and non-Maxwellian with a hot tail in the symmetric unbounded directions (y, z). The plasma space potential decreases with increase in both L and p, the trapped electrons having energies in the range 0–20 eV. In a conventional discharge bounded in all directions, we infer that L and p are similarity parameters for low energy electrons trapped in the bulk plasma that have energies below the plasma space potential (eVp). The simulation results are consistent with a particle balance model. | |
dc.publisher | Frontiers Research Foundation | |
dc.rights | © 2015 Chatterjee, Bhattacharjee, Charles and Boswell. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) or licensor are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms. | |
dc.source | Frontiers in Physics | |
dc.title | Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.identifier.citationvolume | 3 | |
dc.date.issued | 2015-02-24 | |
local.identifier.absfor | 020204 | |
local.identifier.ariespublication | u4695161xPUB154 | |
local.publisher.url | http://www.frontiersin.org/ | |
local.type.status | Published Version | |
local.contributor.affiliation | Chatterjee, Sanghamitro, Indian Institute of Technology Kanpur, India | |
local.contributor.affiliation | Bhattacharjee, Sudeep, Indian Institute of Technology - Kanpur, India | |
local.contributor.affiliation | Charles, Christine, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University | |
local.contributor.affiliation | Boswell, Roderick, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University | |
local.bibliographicCitation.issue | 7 | |
local.bibliographicCitation.startpage | 1 | |
local.bibliographicCitation.lastpage | 9 | |
local.identifier.doi | 10.3389/fphy.2015.00007 | |
dc.date.updated | 2016-02-24T11:18:32Z | |
Collections | ANU Research Publications |
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