Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma
Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma (ICP) at 13.56 MHz. It is found that for both cases of varying L (0.1–0.5 m) and p (1–10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and non-Maxwellian with a hot tail in the symmetric unbounded directions (y, z). The plasma space...[Show more]
|Collections||ANU Research Publications|
|Source:||Frontiers in Physics|
|01_Chatterjee_Electron_energy_probability_2015.pdf||Published Version||4.41 MB||Adobe PDF|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.